Fuse structures, methods of making and using the same, and integrated circuits including the same

ABSTRACT

A fuse structure, an integrated circuit including the structure, and methods for making the structure and (re)configuring a circuit using the fuse. The fuse structure generally includes (a) a conductive structure with at least two circuit elements electrically coupled thereto, (b) a dielectric layer over the conductive structure, and (c) a first lens over both the first dielectric layer and the conductive structure configured to at least partially focus light onto the conductive structure. The method of making the structure generally includes the steps of (1) forming a conductive structure electrically coupled to first and second circuit elements, (2) forming a dielectric layer thereover, and (3) forming a lens on or over the dielectric layer and over the conductive structure, the lens being configured to at least partially focus light onto the conductive structure. The method of (re)configuring a circuit generally includes the steps of (i) irradiating at least one lens on or near a surface of the circuit sufficient to electrically disconnect a corresponding first fuse positioned under the lens and disable a first configuration of the circuit, and (ii) irradiating at least one other lens on or near the surface of the circuit sufficient to electrically disconnect a corresponding second fuse positioned under that lens and enable a second configuration of the circuit. The structure and methods advantageously provide fuse structures having improved reliability and smaller chip area, thereby increasing the yield of the manufacturing process and the numbers of die per wafer (both gross and good).

RELATED APPLICATIONS

This application is a continuation of U.S. application Ser. No.11/136,925, filed May 24, 2005, now U.S. Pat. No. 7,344,924, which is adivisional of U.S. application Ser. No. 10/734,779, filed Dec. 12, 2003,now U.S. Pat. No. 6,940,107.

FIELD OF THE INVENTION

The present invention generally relates to the field of fuses. Morespecifically, embodiments of the present invention pertain to fusestructures, integrated circuits including the same, and methods formaking and using the same.

DISCUSSION OF THE BACKGROUND

Fuses are well known in the integrated circuit industry for configuringor reconfiguring certain kinds of circuits. For example, in largememories, one generally includes several redundant memory blocks thatcan be used in case a block in the main memory is defective.

FIG. 1 shows a simplified block diagram of an integrated circuit 10 withembedded memory 20. Memory 20 is made up of a plurality of main memoryblocks 30 a-30 p and redundant memory blocks 40 a and 40 b. If testingmemory blocks 30 a-30 p shows that one or two of the blocks 30 a-30 pare defective, the defective block(s) can be disabled (or electricallydisconnected) and redundant block(s) 40 a and/or 40 b enabled andeffectively substituted in the place of the defective block(s).Conventionally, disabling defective blocks and enabling redundant blocksis done by cutting a series of fuses on the integrated circuit (IC),either electrically or with a laser. For speed and reliability purposes,laser cutting is generally preferred over electrical disconnection.

FIG. 2A shows a cross-sectional view of a conventional,three-level-metal IC 100, where the metal lines 110 a-b, 120 and 130 a-bare made by a conventional photolithographic process. Lines 110 a-b areconsidered to be on the first level of metallization (M1), line 120 isconsidered to be on the second level of metallization (M2), and lines130 a-b are considered to be on the third level of metallization (M3).Metal line 120 serves as the fuse that electrically connects two circuitelements, such as a power supply/voltage potential (or an input signal)and a functional block of circuitry (such as a block of memory cells),to each other. The two circuit elements are electrically connected tothe fuse through first and second polysilicon lines 140 a-b (generallylocated over shallow trench isolation structures 142 a-b), first andsecond contacts 144 a-b, M1 lines 110 a-b, and M1 vias 114 a-b.

FIG. 2B shows IC 100 after formation (typically by etching) of laserfuse well 135. Typically, the depth of laser fuse well 135 is carefullycontrolled, in order to leave a certain thickness T of oxide/dielectricmaterial 125 over fuse 120. When one knows (1) the thicknesses of thematerials overlying fuse 120 and (2) the effective wavelength of thelaser light with which fuse 120 is irradiated (for cutting), then onemay create or set up standing light waves in the remaining thickness Tof oxide/dielectric material 125 over fuse 120 by etching the laser fusewell 135 to a relatively precise depth.

While not wishing to be bound to any particular theory, it is believedthat when the fuse 120 is sufficiently irradiated, upper layer 122absorbs some percentage of the light and heats up, along with theunderlying bulk metal 124. The heated metal stresses theoxide/dielectric material 125 over fuse 120 (e.g., within thickness T),which eventually cracks and breaks when the stress placed thereon frommetal thermal expansion forces exceeds the maximum strain of theoxide/dielectric material 125 over fuse 120 along thickness T. Thistypically opens a hole in the oxide/dielectric material 125 overlyingfuse 120, and as the fuse 120 continues to absorb light from the laser,it continues to heat up, eventually vaporizing the remaining irradiatedmetal in fuse 120 to electrically disconnect the two circuit elementsfrom one another.

Of course, opening a hole in an exposed surface of an IC introduces arisk of environmental contaminants, such as atmospheric oxygen, watervapor and ozone, getting into the IC and reacting with electricallyfunctional circuit elements, such as metal lines. Also, due tovariations in the thicknesses of the dielectric layers over fuse 120 andtolerances in the etching process that forms well 135, one generallyapplies more power than is necessary to sever the typical fuse 120 inorder to ensure that one severs the worst-case fuse 120 (i.e., the fusewith the greatest thickness and the most overlying dielectric material).Sometimes, application of a little too much power (e.g., to a fusehaving a relatively small thickness and a relatively thin overlyingoxide in the well) can cause cracks to form in the oxide/dielectricmaterial 112 underlying the fuse 120 as well. As a result, a guard ring150 is generally formed in the metal layers around fuse 120 (the fuse120 is connected to circuit elements via polysilicon lines 140 a-b) toprotect other circuit structures from such contamination.

However, in some cases, the physical damage from laser cutting a fuse issufficient to render the chip defective. For example, if one has aprocess in which the yield of making perfectly functional memory blocksis 98%, and the laser cutting success rate is 99.9%, for a designrequiring 16 memory blocks and providing 1000 die/wafer, on average, onewill discard 4 die per wafer simply because the laser cutting processfails 1 time out of 1000. In a more memory-intensive design in a moreadvanced process technology (e.g., where the design requires 64 memoryblocks and provides 2000 die/wafer), if the functional memory blockyield is the same and the laser cutting success rate increases to99.99%, one will discard, on average, 20 die per wafer simply becausethe laser cutting process fails 1 time out of 10,000. As one can see, itis commercially important to maximize the laser cutting rate, and reducethe possible laser repair failure mechanisms.

In all cases, guard rings consume area in the IC that does notcontribute to electrical functionality. As a result, it is desirable toreduce or eliminate guard rings, structures in an IC that generally arenot electrically functional circuitry. If one could eliminate the guardrings, one could increase the number of die per wafer by roughly thesame percentage as the percentage of IC area consumed by the guardrings.

FIGS. 3A and 3B show a similar approach to making and using fuses wherethe metal processing technology is based on the well-known “damascene”metallization. Damascene processes are often used in semiconductorprocess technologies of 0.15 μm or less, and are nearly exclusively usedfor copper metallization. Some of the best-known commercialsemiconductor process technologies that employ damascene metallizationhave six or more layers of metal, where the uppermost layer or two arecomposed primarily of copper.

FIG. 3A shows an IC 200 having four layers of damascene metal, M1 lines246 a and 246 b, M2 lines 210 a and 210 b, M3 line 220, and M4 lines 230a-b. In one implementation, M4 lines 230 a-b are composed primarily ofcopper, while M1 lines 246 a and 246 b, M2 lines 210 a and 210 b and M3line 220 may be primarily composed of copper or aluminum (and ifcomposed primarily of aluminum, capped by an antireflective and/oranti-hillock coating composed primarily of a transition metal, alloy orcompound, such as titanium, titanium nitride, titanium-tungsten alloy ora combination thereof). Metal line 220 serves as the fuse thatelectrically connects two circuit elements to each other. The twocircuit elements are electrically connected to the fuse 220 throughfirst and second polysilicon lines 240 a-b (generally located overshallow trench isolation structures 242 a-b), first and second contacts244 a-b, M1 lines 246 a-b, and M2 lines 210 a-b. The “vias” between theM2/M3 metal lines and the underlying conductive structures are formed atthe same time as the M2/M3 metal lines and are thus continuoustherewith, but the via holes are etched separately from the trenches forthe metal lines. Consequently, the process forming the structures in IC200 is known as “dual damascene” metallization.

FIG. 3B shows IC 200 after forming laser fuse well 235. Similar to thecase in FIG. 2B, one tries to control the depth of laser fuse well 235as carefully as possible, in order to leave a known thickness T ofoxide/dielectric material 225 over fuse 220. What complicates the“damascene” metal embodiment relative to the photolithographic metalembodiment are the thicknesses of the oxide/dielectric materialsoverlying fuse 220, which are typically on the order of 3-4 microns(3000-4000 nm). It can be quite challenging to consistently and/orreliably leave a known thickness T of less than 500 or 600 nm (about thewavelength or half-wavelength of the emitted laser light) over fuse 220,given the variations in process conditions that form IC 200 and laserfuse well 235. In addition, the process of severing the fuse leaves ahole in the upper surface of IC 200, just like in IC 100, therebynecessitating guard ring 250. Consequently, existing laser fusetechnology has a number of drawbacks and/or areas where improvements canbe made.

A need therefore exists for a more reliable method for (re)configuring acircuit using fuses and a method for making more compact (smaller ICarea) fuses.

SUMMARY OF THE INVENTION

Embodiments of the present invention relate to a structure fordisconnecting circuit elements, an integrated circuit including thestructure, and methods for making and (re)configuring a circuit usingthe structure. The structure generally comprises (a) a conductivestructure with at least two circuit elements electrically coupledthereto, (b) a dielectric layer over the conductive structure, and (c) afirst lens over both the first dielectric layer and the conductivestructure configured to at least partially focus light onto theconductive structure. The method of making the structure generallycomprises the steps of (1) forming a conductive structure electricallycoupled to first and second circuit elements, (2) forming a dielectriclayer thereover, and (3) forming a lens on or over the dielectric layerand over the conductive structure, the lens being configured to at leastpartially focus light onto the conductive structure. The method of(re)configuring a circuit generally comprises the steps of (i)irradiating at least one lens on or near a surface of the circuitsufficient to electrically disconnect a corresponding first fusepositioned under the lens and disable a first configuration of thecircuit, and (ii) irradiating at least one other lens on or near thesurface of the circuit sufficient to electrically disconnect acorresponding second fuse positioned under that lens and enable a secondconfiguration of the circuit.

The present invention advantageously provides fuse structures havingimproved reliability and smaller chip area, thereby increasing the yieldof the manufacturing process and the numbers of die per wafer (bothgross and good). These and other advantages of the present inventionwill become readily apparent from the detailed description of preferredembodiments below.

BRIEF DESCRIPTION OF THE DRAWINGS

FIG. 1 is a block diagram showing a conventional integrated circuit (IC)with a memory array having redundant memory blocks.

FIGS. 2A and 2B show a conventional approach to making and cutting aphotolithographically patterned fuse, before forming a laser fuse well(FIG. 2A) and after (FIG. 2B).

FIGS. 3A and 3B show a conventional approach to making and cutting afuse using damascene process technology, before forming a laser fusewell (FIG. 3A) and after (FIG. 3B).

FIG. 4 is a cross-sectional view of an embodiment of the present fusestructure.

FIGS. 5A-5D are top-down views of various embodiments of the fusestructure of FIG. 4.

FIG. 6 is a cross-sectional view of a second embodiment of the presentfuse structure.

FIG. 7 is a cross-sectional view of a third embodiment of the presentfuse structure.

DETAILED DESCRIPTION OF THE PREFERRED EMBODIMENTS

Reference will now be made in detail to the preferred embodiments of theinvention, examples of which are illustrated in the accompanyingdrawings. While the invention will be described in conjunction with thepreferred embodiments, it will be understood that they are not intendedto limit the invention to these embodiments. On the contrary, theinvention is intended to cover alternatives, modifications andequivalents, which may be included within the spirit and scope of theinvention as defined by the appended claims. Furthermore, in thefollowing detailed description of the present invention, numerousspecific details are set forth in order to provide a thoroughunderstanding of the present invention. However, it will be readilyapparent to one skilled in the art that the present invention may bepracticed without these specific details. In other instances, well-knownmethods, procedures, components, and circuits have not been described indetail so as not to unnecessarily obscure aspects of the presentinvention.

Some portions of the detailed descriptions which follow are presented interms of processes, procedures, logic blocks, functional blocks,processing, and other symbolic representations of operations on databits, data streams or waveforms within a computer, processor, controllerand/or memory. These descriptions and representations are generally usedby those skilled in the data processing arts to effectively convey thesubstance of their work to others skilled in the art. A process,procedure, logic block, function, operation, etc., is herein, and isgenerally, considered to be a self-consistent sequence of steps orinstructions leading to a desired and/or expected result. The stepsgenerally include physical manipulations of physical quantities.Usually, though not necessarily, these quantities take the form ofelectrical, magnetic, optical, or quantum signals capable of beingstored, transferred, combined, compared, and otherwise manipulated in acomputer or data processing system. It has proven convenient at times,principally for reasons of common usage, to refer to these signals asbits, waves, waveforms, streams, values, elements, symbols, characters,terms, numbers, or the like.

It should be borne in mind, however, that all of these and similar termsare associated with the appropriate physical quantities and are merelyconvenient labels applied to these quantities. Unless specificallystated otherwise and/or as is apparent from the following discussions,it is appreciated that throughout the present application, discussionsutilizing terms such as “processing,” “operating,” “computing,”“calculating,” “determining,” “manipulating,” “transforming,”“displaying” or the like, refer to the action and processes of acomputer or data processing system, or similar processing device (e.g.,an electrical, optical, or quantum computing or processing device), thatmanipulates and transforms data represented as physical (e.g.,electronic) quantities. The terms refer to actions, operations and/orprocesses of the processing devices that manipulate or transformphysical quantities within the component(s) of a system or architecture(e.g., registers, memories, other such information storage, transmissionor display devices, etc.) into other data similarly represented asphysical quantities within other components of the same or a differentsystem or architecture.

Furthermore, for the sake of convenience and simplicity, the terms“signal,” “bus,” “line” and “trace” may be used interchangeably herein,but are generally given their art-recognized meanings. Also, forconvenience and simplicity, the terms “data,” “data stream,” “waveform”and “information” are generally used interchangeably, as may the terms“connected to,” “coupled with,” “coupled to,” and “in communicationwith” (any one of which may refer to a direct and/or indirectrelationship between two or more elements so connected, coupled, or incommunication), but these terms are also generally given theirart-recognized meanings.

The present invention concerns a structure for disconnecting circuitelements, and methods of making and using the same. The structuregenerally comprises (a) a conductive structure with at least two circuitelements electrically coupled thereto, (b) a dielectric layer over theconductive structure, and (c) a first lens over both the firstdielectric layer and the conductive structure configured to at leastpartially focus light onto the conductive structure.

A further aspect of the invention concerns a method of making astructure for disconnecting circuit elements, generally comprising thesteps of (1) forming a conductive structure electrically coupled tofirst and second circuit elements, (2) forming a dielectric layerthereover, and (3) forming a lens on or over the dielectric layer andover the conductive structure, the lens being configured to at leastpartially focus light onto the conductive structure.

An even further aspect of the invention concerns a method of(re)configuring a circuit, generally comprising the steps of (i)irradiating at least one lens on or near a surface of the circuitsufficient to electrically disconnect a corresponding first fusepositioned under the lens and disable a first configuration of thecircuit; and (ii) irradiating at least one other lens on or near thesurface of the circuit sufficient to electrically disconnect acorresponding second fuse positioned under that lens and enable a secondconfiguration of the circuit.

The invention, in its various aspects, will be explained in greaterdetail below with regard to exemplary embodiments.

Exemplary Fuse Structures

In one aspect, the present invention relates to a structure configuredto disconnect circuit elements, comprising (a) a conductive structurewith at least two circuit elements electrically coupled thereto, (b) adielectric layer over the conductive structure, and (c) a first lensover both the first dielectric layer and the conductive structureconfigured to at least partially focus light onto the conductivestructure. The conductive structure absorbs light having a known orpredetermined wavelength with a minimum threshold efficiency, to enableit to be severed by a laser emitting light at that wavelength. In oneembodiment, the minimum threshold efficiency is a light absorptionefficiency that is sufficiently high that the conductive structure isable to convert the absorbed light to sufficient thermal energy tocreate an electrical disconnection under the irradiation conditionsused. As a result, the dielectric layer should be substantiallytransparent to the known or predetermined wavelength of light, and thefirst lens should be substantially opaque to the known or predeterminedwavelength of light. Furthermore, the conductive structure, in oneembodiment, is substantially horizontal.

The present fuse structure thus includes and/or provides (1) a means forelectrically disconnecting first and second elements of a circuit uponabsorbing a minimum threshold energy of light having a predetermined orknown wavelength, and/or (2) a means for at least partially focusingsuch light onto the electrical disconnection means, where the means forat least partially focusing light is substantially opaque to thewavelength of light.

FIG. 4 shows a cross-sectional view of a first exemplary embodiment 300,including horizontal fuse 320 and lens 330. The fuse 320 generallycomprises a metal or alloy. In one implementation, the metal or alloyconsists essentially of aluminum, alone or with up to about 4 wt. %copper and/or up to about 1 wt. % silicon (preferably aluminum withabout 0.5-2 wt. % copper). Fuse 320 provides electrical communicationsbetween (or electrically connects) first and second circuit elements(not shown, but generally, as described above with reference to FIGS.2A-2B) through first and second polysilicon lines 340 a-b (generallylocated over shallow trench isolation structures 342 a-b), first andsecond contacts 344 a-b, M1 lines 310 a-b, and M1 vias 314 a-b.

Fuse 320 generally comprises three layers of material, a liner orundercoating 322, a bulk conductor 324, and an overcoating 326. Liner322 is conventional, and generally serves as a barrier between M1oxide/dielectric layer 316 and bulk conductor 324, and it may improveadhesion of bulk conductor 324 to M1 oxide/dielectric layer 316. Whenbulk conductor 324 is composed primarily of aluminum, liner 322 isgenerally composed of a refractory material such as titanium, titaniumnitride, titanium-tungsten alloy or a combination thereof. Similar tothe structure of FIGS. 2A-2B, overcoating 326 generally serves as anantireflective and/or anti-hillock coating, and may be composedprimarily of a transition metal, alloy or compound (such as titanium,titanium nitride, titanium-tungsten alloy or a combination thereof).Although liner 322 and overcoating 326 may be composed of the samematerial, they are not necessarily the same. Thus, the fuse maycomprises a bulk layer consisting essentially of the first metal oralloy and an upper layer consisting essentially of another metal oralloy, where the metal or alloy of the upper layer absorbs thewavelength of laser light at a greater efficiency than the first metalor alloy.

Lens 330 comprises center structure or element 332, first peripheralstructures or elements 334 a-b and optional second and third peripheralstructures or elements 336 a-b and 338 a-b, respectively. The lensstructures 332, 334 a-b, and (when present) 336 a-b and 338 a-b arecovered or sealed by a first dielectric layer 331 and (optionally) asecond dielectric layer 333. The dielectric layers are conventional,layer 331 generally comprising a conventional oxide material and layer333 generally comprising a conventional nitride or oxynitride material,both of which are substantially transparent to the wavelengths of lightconventionally used in commercially available laser repair equipment.Thus, the fuse may further comprise a second dielectric layer on or overthe lens (or means for insulating the lens), the second dielectric layerbeing substantially transparent to the first wavelength of light.

The metal lines and other metallization structures in IC 300 aregenerally formed by conventional photolithographic processing (e.g.,depositing one or more layers of metal and/or other conductive material,depositing photoresist thereon, irradiating the photoresist through amask, developing the irradiated photoresist, etching the exposed metal,and removing the remaining photoresist to leave a patterned layer ofmetallization). Advantageously, the lens structures 332, 334 a-b, 336a-b and 338 a-b can be formed at the same time and from the samematerials as the uppermost layer of metal (in IC 300, the third layer ofmetal M3). Thus, the lens may comprise a second metal or alloy the sameas or different from the first metal or alloy of fuse 320. In theembodiment of FIG. 4, the second metal/alloy is preferably the same asthe first metal or alloy (which is the bulk conductor 324 in thethree-layer metal fuse).

One can even design the dimensions and inter-structure spacings of lensstructures 332, 334 a-b, 336 a-b and 338 a-b so that, after depositionof dielectric layers 331 and/or 333, the lens functions as (and thuscomprises) a fresnel lens, although other lens types and structures(such as a collimating lens, a diffractive lens, a refractive lens,etc.) are certainly suitable for use in the present invention.

FIGS. 5A-5D show top-down views of four embodiments of lens 330,omitting the overlying dielectric layer(s) and the third, outermost“ring” of peripheral elements 338 a-b for clarity. Referring to FIG. 5A,lens 330 includes central element 332, a first plurality of peripheralelements 334 a-i and a second plurality of peripheral elements 336 a-i.Notably, the central element 332 is larger than each of the peripheralelements 334 a-336 i along at least two dimensions (in this case, thetwo dimensions are the “xy” plane of the page).

In the embodiment of FIG. 5A, the first plurality of peripheral elements334 a-i form a regular geometric figure (in this case, a “ring” or anoctagon), and each of peripheral elements 334 a-i have common,substantially equal dimensions and are substantially equally spacedapart from a nearest peripheral element. For example, the distancebetween peripheral element 334 i and peripheral element 334 a is thesame as the distance between peripheral element 334 a and peripheralelement 334 c, and so forth around the ring of peripheral elements 334a-i.

Furthermore, the first plurality of peripheral elements 334 a-i may besubstantially equally spaced apart from the central element 332. Inother words, there may be a distance between a point along the inneredge of each of peripheral elements 334 a-i and the nearest point on theouter surface of central element 332 that is the same or substantiallythe same as the corresponding distances between the others of peripheralelements 334 a-i and the nearest point on the outer surface of centralelement 332.

From a practical perspective, however, since almost all design softwareand systems lay out physical structures in squares (generally having anarea as small as possible in a given system), central structure 332 mayhave a shape other than circular, such as square, rectangular, oval (aresult of optical proximity effects on a laid-out rectangle for whichsuch effects are not corrected), cross, square with a series ofrectangles with a common circumferential length and a common centerpoint or origin overlaid along both axes of the “xy” plane, etc.Similarly, peripheral elements 334 a-i are not limited to square shapesas shown in FIGS. 5A-5B, but may have another shape such as circular,rectangular, oval, cross, etc. Furthermore, the orientation ofperipheral elements 334 a-i is not limited to that of a ring or aregular geometric figure, but may have first and second surfacesparallel with corresponding first and second surfaces of others of theperipheral elements 334 a-i (and perhaps all of the other peripheralelements 334 a-i). For example, in the square peripheral element example330′ shown in FIG. 5B, each of peripheral elements 334 a′-334 i′ hasfirst, second, third and fourth surfaces parallel with correspondingfirst, second, third and fourth surfaces of all of the other peripheralelements 334 a′-334 i′. Furthermore, each of peripheral elements 336a′-336 i′ has first, second, third and fourth surfaces parallel withcorresponding first, second, third and fourth surfaces of all of theother peripheral elements 336 a′-336 i′ and/or 334 a′-334 i′.

Thus, the lens may further comprise a second plurality of peripheralelements surrounding the first plurality of peripheral elements. Thenumber of peripheral elements in the second plurality may be the same asor different from the number of peripheral elements in the firstplurality. For example, when the number of peripheral elements in thesecond plurality is the same as the first plurality, the average oreffective thickness of the “ring” defined by the second plurality ofperipheral elements is less than the average or effective thickness ofthe “ring” defined by the first plurality of peripheral elements,contributing to the structure and/or function of a fresnel lens. On theother hand, the number of peripheral elements in the second pluralitymay be greater than the first plurality, in some embodiments by a factorof at least 1.5 times.

Referring now to FIG. 5C, lens 330″ includes central element 332″, afirst plurality of peripheral elements 334 a″ and 334 b″ and a secondplurality of peripheral elements 336 a″ and 336 b″. Notably, the centralelement 332″ is larger than each of the peripheral elements 334 a″ and336 b″ along one dimension (in this case, the dimension is one in the“xy” plane of the page). The embodiment of FIG. 5C may be considered a“one-dimensional” lens pattern, in which each of peripheral elements 334a″, 334 b″, 336 a″ and 336 b″ has first, second, third and fourthsurfaces parallel with corresponding first, second, third and fourthsurfaces of central element 332″ and all of the other peripheralelements 334 a″-336 b″.

In the embodiment of FIG. 5D, lens 360 includes central element 362, afirst peripheral ring element 364 and a second peripheral ring element366 in what may be considered a “two-dimensional” arrangement. Theperipheral ring elements may form a regular geometric figure (such as asquare, rectangle, circle, or as in this case, an octagon), and each ofperipheral ring elements 364 and 366 may have substantially equal widthsand are substantially equally spaced apart from a nearest element (i.e.,center element and/or peripheral ring element). For example, thedistance between peripheral ring element 366 and peripheral ring element364 may be the same as the distance between peripheral ring element 364and central element 362. The orientation of peripheral ring elements334-336 is not limited to that of an octagon or other regular geometricfigure, but may have first and second surfaces parallel withcorresponding first and second surfaces of the other peripheral ringelement(s) (and perhaps all of the other peripheral ring elements, ifthere is more than one).

Thus, the lens may further comprise one or more second peripheralelements outside the first peripheral element(s) relative to a centralelement. The number of second peripheral elements may be the same as ordifferent from the number of first peripheral elements (although it maybe the same), and the length and/or width of the second peripheralelement(s) may be the same as or different from the length and/or widthof the first peripheral element(s) (although the height will generallybe the same). For example, when the width of the second peripheralelement(s) differs from the first peripheral element(s), the arrangementcontributes to the structure and/or function of a fresnel lens. On theother hand, the number of second peripheral elements may be greater thanthe number of first peripheral elements, in some embodiments by a factorof 2, 4, or more times. For example, referring to FIG. 5C, either orboth of second peripheral elements 336 a″ and 336 b″ may be replacedwith a plurality of square or rectangular spaced elements, insubstantially the same area (or “footprint”) as the corresponding secondperipheral element(s) 336 a″ and/or 336 b″. Such an arrangement is alsobelieved to contribute to the structure and/or function of a fresnellens. When the lens further comprises a third plurality of peripheralelements surrounding the second peripheral element(s), the number ofperipheral elements in the third plurality may be the same as ordifferent from the number of second peripheral elements, but whendifferent, the number of peripheral elements in the third plurality maybe at least 2 times the number of first and/or second peripheralelements.

FIG. 6 shows a second embodiment 400 of the present structure, includinghorizontal fuse 420 and lens 430. The fuse 420 generally comprisesaluminum, an aluminum alloy (as described above with respect to FIG. 4)or copper, and in various implementations, horizontal fuse 420 consistsessentially of aluminum, one of the above-mentioned aluminum alloys, orcopper. Fuse 420 provides electrical communication between first andsecond circuit elements through first and second polysilicon lines 440a-b (generally located over shallow trench isolation structures 442a-b), first and second contacts 444 a-b, M1 lines 446 a-b and M2 lines410 a-b.

Fuse 420 may comprise two layers of material, a liner or undercoating422, and a bulk conductor 424. Liner 422 is conventional, and generallyserves as a barrier between M3 oxide/dielectric layer 428 and bulkconductor 424, and it may improve adhesion of bulk conductor 424 to M3oxide/dielectric layer 428. When bulk conductor 424 is composedprimarily of aluminum, liner 422 is generally composed of a refractorymaterial such as titanium, titanium nitride, titanium-tungsten alloy ora combination thereof. When bulk conductor 424 is composed primarily ofcopper, liner 422 is generally composed of a refractory material such astantalum, tantalum nitride, titanium nitride, or a combination thereof.Thus, the fuse may comprise a bulk layer consisting essentially of thefirst metal or alloy and a lower layer consisting essentially of anothermetal or alloy.

Like the lens 330 of FIGS. 4 and 5A-B, lens 430 comprises center element432, first peripheral elements 434 a-b and optional second peripheralelements 436 a-b, respectively. The lens structures 432, 434 a-b, and(when present) 436 a-b are covered or sealed by a dielectric layer 435.The dielectric layer is conventional, and generally comprises aconventional oxide, nitride and/or oxynitride material, all of which aresubstantially transparent to the wavelengths of light conventionallyused in commercially available laser repair equipment.

The metal lines and other metallization structures in IC 400 aregenerally formed by conventional dual damascene processing (e.g.,depositing one or more layers of oxide and/or other dielectric material,depositing photoresist thereon, irradiating the photoresist through amask, developing the irradiated photoresist, etching the exposeddielectric to form via holes or trenches, removing the remainingphotoresist, repeating the photoresistdeposition/irradiation/development-oxide etch-photoresist removal stepsto form the other of the via holes or trenches, depositing metal, andremoving the metal outside the trenches and via holes [generally bychemical-mechanical polishing] to leave a layer of metallization).Advantageously, the lens structures 432, 434 a-b, and 436 a-b can beformed at the same time (at least during trench etch; the lens area maybe masked off by photoresist during via etch) and from the samematerials as the uppermost layer of metal (in IC 400, the fourth layerof metal M4). Alternatively, if one desires lens structures 432, 434a-b, and 436 a-b to have a different thickness than the uppermost layerof metal, one may pattern and etch the area(s) corresponding to lens 430separately from the remainder of the uppermost layer of metal.

FIG. 7 shows a third embodiment of the present fuse, comprising aplurality of lenses. In IC 500, laser light is irradiated onto firstlens 530 (which may be similar in structure to lens 330 of FIG. 4),which at least partially focuses the light onto second lens 520, whichat least partially focuses the light onto third lens 510, which then atleast partially focuses the light onto horizontal fuse 540. In such anembodiment, the conductive structure 540 comprises silicon (which may bein the form of polysilicon, amorphous silicon, or apolysilicon-transition metal silicide bilayer). Advantageously, lens 530may be formed at the same time and using the same materials as M3 metallines, lens 520 may be formed at the same time and using the samematerials as M2 metal lines, and lens 510 may be formed at the same timeand using the same materials as M1 metal lines. This embodiment enablesuse of a highly light-absorbent material (silicon and/or a transitionmetal silicide) as a fuse, while at the same time, retaining all of theadvantages of the single-lens embodiments of FIGS. 4 and 6.

Thus, the present fuse may further comprise a second lens under thefirst lens and over the conductive structure, the second lens beingsubstantially opaque to the first wavelength of light and beingconfigured to (i) receive the at least partially focused light from thefirst lens and (ii) further focus the light onto the conductive fuse.Alternatively, the fuse further comprises a second means for at leastpartially focusing light having the first wavelength onto the means forelectrically disconnecting circuit elements from one another.

An Exemplary Integrated Circuit

A further aspect of the invention relates to an integrated circuit,comprising the present fuse and a first circuit in electricalcommunication with the first fuse, configured to be disabled when thefirst fuse is electrically disconnected. As described above, theintegrated circuit advantageously does not include a guard ring aroundthe present fuse. Since the present fuse generally does not open a holein the IC surface, a dedicated structure for protecting other circuitryin the IC from exposure to potential sources of damage or contaminationafter the fuse is irradiated is not necessary. Thus, the nearestconductive structure to the fuse in the same level of metallization maybe one that provides a signal or electric potential (power supply) forone or more electronic functions in the IC.

The integrated circuit may have one or more of a number of functions,such as data storage (e.g., memory), data processing (e.g., logic),signal processing, timing, etc. Thus, in various embodiments, the firstcircuit in electrical communication with the fuse may comprises a row,column or block of memory; a signal path including at least one switchor switching element; or a data processing circuit including at leastone logic block or logic gate.

The integrated circuit may comprise two or more substantially identicalfuses (or sets of fuses), and a second circuit in electricalcommunication with the second fuse (or set of fuses), configured to beenabled when the second fuse is electrically disconnected. In such anembodiment, the second circuit provides a function that the firstcircuit is designed to provide (but which may be defective in the firstcircuit). Typically, a design will use a first plurality (i.e., two ormore) of fuses for disconnecting a first (defective) circuit and asecond plurality of fuses for enabling a second (redundant and/orreplacement) circuit.

Exemplary Methods of Making a Fuse

The present invention further relates to method of making a structureconfigured to disconnect circuit elements, comprising the steps of: (1)forming a conductive structure electrically coupled to first and secondcircuit elements, (2) forming a dielectric layer thereover, and (3)forming a lens on or over the dielectric layer and over the conductivestructure, the lens being configured to at least partially focus lightonto the conductive structure. As described above for the fuse, thefirst conductive structure absorbs a known or predetermined wavelengthof light with a minimum threshold efficiency, while the dielectric layeris substantially transparent and the lens is substantially opaque tothat wavelength of light, to enable laser cutting of the fuse material.Because the present method advantageously uses existing, conventionalphotolithographic and/or damascene process technology to form thecomponents, a number of structures in the present fuse can be formed atthe same time as other components in the IC. For example, the step offorming the conductive structure may further comprise simultaneouslyforming a first plurality of conductive structures, and/or the step offorming the first lens may further comprise simultaneously forming asecond plurality of conductive structures. In this embodiment, either orboth of the first and second plurality of conductive structures may besubstantially horizontal.

As for conventional photolithographic and/or damascene processtechnology, the present method of making a fuse may comprise (A)depositing one or more layers of metal and/or other conductive material,depositing photoresist thereon, irradiating the photoresist through amask, developing the irradiated photoresist, etching the exposed metal,and/or removing the remaining photoresist to leave a patterned layer ofmetallization; or (B) depositing one or more layers of oxide and/orother dielectric material, depositing photoresist thereon, irradiatingthe photoresist through a mask, developing the irradiated photoresist toexpose predetermined portions of the dielectric layer(s), etching theexposed dielectric to form either via holes or trenches, removing theremaining photoresist, repeating the photoresist deposition,irradiating, developing, etching and photoresist removal steps to formthe other of the via holes or trenches, optionally depositing a linerlayer sufficient to thoroughly cover the exposed surfaces of the IC,depositing metal into the via holes and trenches sufficiently to fillthe via holes and trenches, and/or removing the metal outside thetrenches and via holes (generally by chemical-mechanical polishing) toleave a layer of metallization. Thus, the present method of making afuse may further comprise the step(s) of (i) forming a second dielectriclayer on or over the first lens, (ii) forming a second lens over thesecond dielectric layer, the second lens being substantially opaque tothe first wavelength of light and being configured to at least partiallyfocus light having the first wavelength onto the first lens; (iii)forming the first and second circuit elements before and/orsimultaneously with forming the conductive structure; (iv) formingelectrical contacts to the first and second circuit elements beforeforming the conductive structure.

Exemplary Methods of (Re)Configuring a Circuit Using a Fuse

In a further embodiment, the invention relates to a method of(re)configuring a circuit, comprising the steps of: (i) irradiating atleast one lens on or near a surface of the circuit sufficient toelectrically disconnect a corresponding first fuse positioned under thelens and disable a first configuration of the circuit; and (ii)irradiating at least one other lens on or near the surface of thecircuit sufficient to electrically disconnect a corresponding secondfuse positioned under that lens and enable a second configuration of thecircuit. As detailed above, each of the lenses are substantially opaqueto a known or predetermined wavelength of light and are configured to atleast partially focus light of that wavelength onto the correspondingfuses, and each of the fuses are electrically coupled to thecorresponding first and second circuit elements and are configured toabsorb the wavelength of light with a minimum threshold efficiency.Although the lens may be made from substantially the same material asthe fuse, the lens does not absorb sufficient light to adversely affectits light-focusing function (and thus is substantially opaque) when thelight (typically from a laser) is focused on the fuse (e.g., at a depthcorresponding to the position of the fuse).

The first configuration is typically the native configuration asmanufactured and/or prior to laser repair, and the second configurationis typically the repaired configuration (e.g., with input signals thatwould have been transmitted to the first circuit rerouted to the secondcircuit, and outputs that would have been transmitted by the firstcircuit provided instead by the second circuit). However, fuses are alsocommonly used to configure an integrated circuit. In such a case, onemay design a circuit to have a plurality of different configurations,and one of the configurations can be selected by cutting one or morefuses corresponding to the selected configuration. For example, one maydesign a memory such that one of a plurality of predetermined depths,widths and/or densities is selectable; one may disable a function (suchas parity checking) in a data communications device; one may select thestate of a read-only memory cell (a fuse being a type of ROM); etc. Whenthe circuit has an operable default configuration, the circuit may bereconfigured by disconnecting one or more of the circuits or circuitelements in the default configuration, and/or connecting (and/orenabling) one or more replacement circuits or circuit elements in thenew configuration.

As described above, the circuit to be disconnected is generallycontained within an integrated circuit. Many IC designs employ groups oftwo or more fuses to either disconnect a defective circuit to berepaired or enable a replacement circuit for the disconnected circuit.Thus, the present method of (re)configuring a circuit may comprise (i)irradiating a plurality of first lenses sufficient to electricallydisconnect a corresponding plurality of first fuses and disable thefirst configuration of the circuit, and/or (ii) irradiating a pluralityof second lenses sufficient to electrically disconnect a correspondingplurality of second fuses and enable the second configuration of thecircuit.

CONCLUSION/SUMMARY

Thus, the present invention provides a structure for disconnectingcircuit elements, an integrated circuit including the structure, andmethods for making and (re)configuring a circuit using the structure.The structure generally comprises (a) a conductive structure with atleast two circuit elements electrically coupled thereto, (b) adielectric layer over the conductive structure, and (c) a first lensover both the first dielectric layer and the conductive structureconfigured to at least partially focus light onto the conductivestructure. The method of making the structure generally comprises thesteps of (1) forming a conductive structure electrically coupled tofirst and second circuit elements, (2) forming a dielectric layerthereover, and (3) forming a lens on or over the dielectric layer andover the conductive structure, the lens being configured to at leastpartially focus light onto the conductive structure. The method of(re)configuring a circuit generally comprises the steps of (i)irradiating at least one lens on or near a surface of the circuitsufficient to electrically disconnect a corresponding first fusepositioned under the lens and disable a first configuration of thecircuit, and (ii) irradiating at least one other lens on or near thesurface of the circuit sufficient to electrically disconnect acorresponding second fuse positioned under that lens and enable a secondconfiguration of the circuit. The present invention advantageouslyprovides fuse structures having improved reliability and smaller chiparea, thereby increasing the yield of the manufacturing process and thenumbers of die per wafer (both gross and good).

The foregoing descriptions of specific embodiments of the presentinvention have been presented for purposes of illustration anddescription. They are not intended to be exhaustive or to limit theinvention to the precise forms disclosed, and obviously manymodifications and variations are possible in light of the aboveteaching. The embodiments were chosen and described in order to bestexplain the principles of the invention and its practical application,to thereby enable others skilled in the art to best utilize theinvention and various embodiments with various modifications as aresuited to the particular use contemplated. It is intended that the scopeof the invention be defined by the claims appended hereto and theirequivalents.

1. A method of making a structure configured to disconnect circuitelements, the method comprising: forming a conductive structureelectrically coupled to first and second circuit elements; forming afirst dielectric layer over said first dielectric layer beingsubstantially transparent to a first wavelength of light; and forming afirst lens on or over said first dielectric layer, and over saidconductive structure, said first lens being substantially opaque to saidfirst wavelength of light and being configured to at least partiallyfocus light having said first wavelength onto said conductive structure.2. The method of claim 1, further comprising forming said first andsecond circuit elements before forming said conductive structure.
 3. Themethod of claim 2, further comprising forming electrical contacts tosaid first and second circuit elements before forming said conductivestructure.
 4. The method of claim 1, wherein forming said conductivestructure further comprises simultaneously forming a first plurality ofconductive structures.
 5. The method of claim 1, wherein forming saidfirst lens further comprises simultaneously forming a second pluralityof conductive structures.
 6. The method of claim 1, further comprisingforming a second dielectric layer on or over said first lens.
 7. Themethod of claim 6, further comprising forming a second lens over saidsecond dielectric layer, said second lens being substantially opaque tosaid first wavelength of light and being configured to at leastpartially focus light having said first wavelength onto said first lens.8. The method of claim 7, further comprising forming a third dielectriclayer on or over said second lens.
 9. The method of claim 8, furthercomprising forming a third lens over said second dielectric layer, saidthird lens being substantially opaque to said first wavelength of lightand being configured to at least partially focus light having said firstwavelength onto said second lens.
 10. The method of claim 9, furthercomprising forming a fourth dielectric layer on or over said third lens.11. The method of claim 10, further comprising forming a fourth lensover said fourth dielectric layer, said fourth lens being substantiallyopaque to said first wavelength of light and being configured to atleast partially focus light having said first wavelength onto said thirdlens.
 12. The method of claim 1, wherein said first lens comprises afresnel lens.
 13. The method of claim 1, wherein said first lenscomprises a central element and a first plurality of peripheral elementsadjacent to said central element.
 14. The method of claim 13, whereinsaid first plurality of peripheral elements have common, substantiallyequal dimensions and are substantially equally spaced apart from anearest peripheral element.
 15. The method of claim 13, wherein saidcentral element is larger than each of said first peripheral elementsalong at least one dimension.
 16. The method of claim 13, furthercomprising a second plurality of peripheral elements adjacent to saidfirst plurality of peripheral elements.
 17. The method of claim 1,wherein said conductive structure comprises silicon.
 18. The method ofclaim 1, wherein said conductive structure comprises a first metal oralloy.
 19. The method of claim 18, wherein said first lens comprises asecond metal or alloy, said second metal or alloy being the same as ordifferent from said first metal or alloy.
 20. The method of claim 19,wherein said second metal or alloy is the same as said first metal oralloy, and forming said conductive structure comprises depositing a bulklayer consisting essentially of said first metal or alloy and depositingan upper layer consisting essentially of a third metal or alloy, saidthird metal or alloy absorbing said first wavelength of light at agreater efficiency than said first metal or alloy.
 21. The method ofclaim 1, wherein said first lens comprises a metal or alloy.
 22. Themethod of claim 1, wherein said first conductive structure absorbs saidfirst wavelength of light.
 23. The method of claim 22, wherein saidfirst conductive structure absorbs said first wavelength of light with aminimum threshold efficiency.